OEMs Supported

OEM_2

Formulation

Flask in scientist hand and test tubes in rack

The final properties of the PVAc material can be affected by a number of factors during the manufacturing process. These factors include the molecular weight of the polymer, the degree of hydrolysis of the raw PVA as well as the concentration of the reactants. The degree of reaction, or acetalization will dramatically affect the resulting properties of the material. This is controlled by reaction times, temperature, reactant type and concentration.

Sy_2

Symmetry

Designed with optimized molecular crosslinking, slightly lower density, and higher water absorption; this stable formulation provides superior chemical compatibility leading to increased brush lifetime.

F2_2

F2

Incorporating an alternative acid catalyst, F2 provides a lower compressibility option to Symmetry with smaller median pore size; resulting in improved cleaning efficiency for more challenging FEoL hydrophobic films and layers (STI, SiN and poly-Si).

Ec_2

Eclipse

Formulated with cleaner raw materials to meet the growing demands of BEoL interconnect materials (Cu, Co, Ru), Eclipse provides the lowest commercially available compressive stress, preferred electrokinetic properties, and  lowest level of both releasable and trace metal contamination.

Eh_2

Eclipse HCS

Utilizing the same clean raw material package as Eclipse, Eclipse HCS has been reformulated to provide a higher compressive stress which delivers a more mechanical clean required for increasing numbers of ≤10nm FEoL/MoL (RMG) semiconductor layers with challenging and critical cleaning requirements.

Hy_2

Hydrocell

Highly durable formulation used for critical cleaning applications that extend across many market segments including semiconductor, data storage, and MEMs.

Typical Physical Properties

  Hydrocell Symmetry F2 Eclipse Eclipse HCS
30% Compressive Stress (g/cm²) 170 95 73 68 90
Apparent Density (g/cm³) 0.117 0.100 0.097 0.098 0.101
% Water Absorption 849 1000 1040 1040 1012
% Porosity 87 89 90 90 90
Median Pore Size (μm) 153 125 89 81 80
SEM_2b