|
Applied Materials
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|
Product Description
|
Tool
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Dimensions
(ODxIDxLong mm)
|
Style
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Wafer
Size
|
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Symmetry MC-PVA-64
|
Mirra Mesa
|
70 x 31 x 216
|
Nodule
|
200mm
|
|
Symmetry MC-PVA-65
|
Reflexion
|
70 x 31 x 317
|
Nodule
|
300mm
|
|
Convac
|
|
Symmetry MC-PVA-12
|
CR-5
|
60 x 32 x 127
|
Nodule
|
|
|
Symmetry MC-PVA-13
|
CR-5
|
60 x 32 x 152
|
Nodule
|
|
|
Symmetry MC-PVA-17
|
|
48 x 26 x 111
|
Nodule
|
|
|
Symmetry MC-PVA-32
|
|
76 x 38 x 114
|
Nodule
|
|
|
DNS
|
|
Symmetry MC--PVA-X-Brush
|
AS2000
|
|
X Brush
|
|
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Symmetry MC-PVA-Plug 19x8x22x31
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|
19 x 8 x 22 x 31
|
Plug
|
|
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Symmetry MC-PVA-Plug 14x7.5x20x28
|
|
14 x 7.5 x 20.5 x 28
|
Plug
|
|
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Symmetry MC-PVA-Plug 15x8x25x30
|
|
15 x 8 x 25 x 30
|
Plug
|
|
|
EBARA
|
|
Symmetry MC-PVA-57
|
EPO Series
F*REX
|
38 x 18 x 208
|
Nodule
|
200mm
200mm
|
|
Symmetry MC-PVA-77
|
F*REX
|
38 x 18 x 310
|
Nodule
|
300mm
|
|
Symmetry Pre-Installed MC-PVA-57
|
EPO Series
|
Pre-installed w/core
|
Nodule
|
200mm
|
|
Symmetry
MC-PVA-PB-01L
|
|
Left
|
Pencil Brush
|
|
|
Symmetry MC-PVA-PB-01R
|
|
Right
|
Pencil Brush
|
|
|
Symmetry MC-PVA-Plug 15x8x20x28
|
F*REX
|
15-8-20-28
|
Plug
|
|
|
Lam Research/OnTrak
|
|
Symmetry MC-PVA-33
|
DSS
|
60 x 32 x 254
|
Nodule
|
200mm
|
|
Symmetry MC QuickTrak PVA-18
|
All OnTrak Tools
|
60 x 32 x 241
Pre-installed w/core
|
Nodule
|
|
|
|
|
Novellus/SpeedFam/IPEC
|
|
Symmetry MC-PVA-15
|
|
48 x 26 x 146
|
Nodule
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|
|
Symmetry MC-PVA-24
|
|
30 x 17 x 120
|
Smooth
|
|
|
Symmetry MC-PVA-25
|
|
30 x 17 x 170
|
Smooth
|
|
|
Symmetry
MC-PVA-37
|
Capella
|
30 x 17 x 220
|
Smooth
|
|
|
Symmetry MC-PVA-Puck Brush 5.0 Left
|
AvantGaard 776
|
Left
|
Puck Brush
|
|
|
Symmetry MC-PVA-Puck Brush 5.0 Right
|
|
Right
|
Puck Brush
|
|
|
SSEC
|
|
Symmetry MC-PVA-6
|
Evergreen
|
48 x 26 x 190
|
Nodule
|
|
|
Symmetry MC-PVA-22
|
|
60 x 32 x 216
|
Nodule
|
|
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Symmetry MC-PVA-58
|
|
48 x 26 x 95
|
Nodule
|
|
|
Symmetry MC-PVA-61
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|
48 x 26 x 152
|
Nodule
|
|
|
Symmetry MC-PVA-62
|
|
48 x 26 x 178
|
Nodule
|
|
|
Symmetry MC-PVA-63
|
|
48 x 26 x 184
|
Nodule
|
|
|
Symmetry MC-PVA-68
|
|
76 x 38 x 70
|
Nodule
|
|
|
Symmetry MC-PVA-71
|
|
76 x 38 x 206
|
Nodule
|
|
|
Symmetry MC-PVA-74
|
|
76 x 38 x 356
|
Nodule
|
|
|
Symmetry MC-PVA-78
|
|
48 x 26 x 340
|
Nodule
|
|
|
Symmetry MC-PVA-79
|
|
48 x 26 x 201
|
Nodule
|
|
|
Symmetry MC-PVA-80
|
|
48 x 26 x 217
|
Nodule
|
|
|
Symmetry MC-PVA-83
|
|
48 x 26 x 279
|
Nodule
|
|
|
Xyratex
|
|
|
|
|
|
Symmetry MC-PVA-13
|
Xyratex 01K, 02K
|
60 x 32 x 152
|
Nodule
|
|
|
Additional
Tools Supported
|
|
Symmetry MC-PVA-40
|
Steag
|
60 x 32 x 317
|
Smooth
|
|
|
Symmetry MC-PVA-86
|
Peter Wolters
|
30 x 17 x 320
|
Smooth
|
|
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