 |
| PVA Products By Tool |
|
Applied
Materials
|
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| Product Description | Tool | Dimensions (ODxIDxLong mm) |
Style | Wafer
Size |
| Symmetry MC-PVA-64 | Mirra Mesa | 70 x 31 x 216 | Nodule | 200mm |
| Symmetry MC-PVA-65 | Reflexion | 70 x 31 x 317 | Nodule | 300mm |
|
Convac |
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| Symmetry MC-PVA-12 | CR-5 | 60 x 32 x 127 | Nodule | |
| Symmetry MC-PVA-13 | CR-5 | 60 x 32 x 152 | Nodule | |
| Symmetry MC-PVA-17 | 48 x 26 x 111 | Nodule | ||
| Symmetry MC-PVA-32 | 76 x 38 x 114 | Nodule | ||
DNS |
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| Symmetry MC--PVA-X-Brush | AS2000 | X Brush | ||
| Symmetry MC-PVA-Plug 19x8x22x31 | 19 x 8 x 22 x 31 | Plug | ||
| Symmetry MC-PVA-Plug 14x7.5x20x28 | 14 x 7.5 x 20.5 x 28 | Plug | ||
| Symmetry MC-PVA-Plug 15x8x25x30 | 15 x 8 x 25 x 30 | Plug | ||
EBARA |
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| Symmetry MC-PVA-57 | EPO Series F*REX |
38 x 18 x 208 | Nodule | 200mm 200mm |
| Symmetry MC-PVA-77 | F*REX | 38 x 18 x 310 | Nodule | 300mm |
| Symmetry Pre-Installed MC-PVA-57 | EPO Series | Pre-installed w/core | Nodule | 200mm |
| Symmetry MC-PVA-PB-01L | Left | Pencil Brush | ||
| Symmetry MC-PVA-PB-01R | Right | Pencil Brush | ||
| Symmetry MC-PVA-Plug 15x8x20x28 | F*REX | 15-8-20-28 | Plug | |
Lam Research/OnTrak |
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| Symmetry MC-PVA-33 | DSS | 60 x 32 x 254 | Nodule | 200mm |
| Symmetry MC QuickTrak PVA-18 | All OnTrak Tools | 60 x 32
x 241 Pre-installed w/core |
Nodule | |
Novellus/SpeedFam/IPEC |
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| Symmetry MC-PVA-15 | 48 x 26 x 146 | Nodule | ||
| Symmetry MC-PVA-24 | 30 x 17 x 120 | Smooth | ||
| Symmetry MC-PVA-25 | 30 x 17 x 170 | Smooth | ||
|
Symmetry MC-PVA-37 |
Capella | 30 x 17 x 220 | Smooth | |
| Symmetry MC-PVA-Puck Brush 5.0 Left | AvantGaard 776 | Left | Puck Brush | |
| Symmetry MC-PVA-Puck Brush 5.0 Right | Right | Puck Brush | ||
SSEC |
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| Symmetry MC-PVA-6 | Evergreen | 48 x 26 x 190 | Nodule | |
| Symmetry MC-PVA-22 | 60 x 32 x 216 | Nodule | ||
| Symmetry MC-PVA-58 | 48 x 26 x 95 | Nodule | ||
| Symmetry MC-PVA-61 | 48 x 26 x 152 | Nodule | ||
| Symmetry MC-PVA-62 | 48 x 26 x 178 | Nodule | ||
| Symmetry MC-PVA-63 | 48 x 26 x 184 | Nodule | ||
| Symmetry MC-PVA-68 | 76 x 38 x 70 | Nodule | ||
| Symmetry MC-PVA-71 | 76 x 38 x 206 | Nodule | ||
| Symmetry MC-PVA-74 | 76 x 38 x 356 | Nodule | ||
| Symmetry MC-PVA-78 | 48 x 26 x 340 | Nodule | ||
| Symmetry MC-PVA-79 | 48 x 26 x 201 | Nodule | ||
| Symmetry MC-PVA-80 | 48 x 26 x 217 | Nodule | ||
| Symmetry MC-PVA-83 | 48 x 26 x 279 | Nodule | ||
Xyratex |
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| Symmetry MC-PVA-13 | Xyratex 01K, 02K | 60 x 32 x 152 | Nodule | |
|
Additional Tools Supported |
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| Symmetry MC-PVA-40 | Steag | 60 x 32 x 317 | Smooth | |
| Symmetry MC-PVA-86 | Peter Wolters | 30 x 17 x 320 | Smooth | |
Copyright
2007 ITW Rippey - All rights reserved.